Zhaotao Liu
at Univ of Science and Technology of China
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | August 17, 2004
Proc. SPIE. 5458, Optical Micro- and Nanometrology in Manufacturing Technology
KEYWORDS: Microelectromechanical systems, Mechanics, Speckle, Interferometry, Scanning electron microscopy, Speckle pattern, Data processing, Speckle interferometry, Aluminum, Liquids

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