Mr. Zhaoxiang Chu Profile

Zhaoxiang Chu

Manager at Shanghai Micro Electronics Equipment Co Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 10 March 2010 Paper

CDU linear model based on aerial image principal components

Anatoly Burov, Zhiyong Yang, Zhaoxiang Chu, Liang Li, Fan Wang

Proceedings Volume 7640, 764035 (2010) https://doi.org/10.1117/12.848429

KEYWORDS: Process modeling, Wavefronts, Image quality, Lithography, Image processing, Critical dimension metrology, Mirrors, Performance modeling, Inspection, Mathematical modeling

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years