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Zhe Xu
at HeJian Technology Co Ltd
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Author
Publications (1)
Proceedings Article | 20 October 2006 Paper
The automatic back-check mechanism of mask tooling database and automatic transmission of mask tooling data
Zhe Xu, M. G. Peng, Lin Hsin Tu, Cedric Lee, J. K. Lin, Jian Feng Jan, Alb Yin, Pei Wang
Proceedings Volume 6349, 63493S (2006) https://doi.org/10.1117/12.675392
KEYWORDS: Photomasks, Databases, Semiconducting wafers, Manufacturing, Error analysis, Wafer testing, Human-machine interfaces, Lithography, Reticles, Standards development
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