Zheguang Fan
at Hefei Univ of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 24, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Signal to noise ratio, Refractive index, Mirrors, Fiber Bragg gratings, Interferometers, Sensors, Fiber optics sensors, Data acquisition, Optoelectronics, Data processing

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