CONFERENCE PROCEEDINGS
Advanced Search
Zhen Liu
at Shanghai Univ
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 16 December 2013 Paper
Study on growth optimization and metallization of AlN thin films
Zhen Liu, Bin Zhang, Tao Zhu, Yigang Chen
Proceedings Volume 9068, 90681M (2013) https://doi.org/10.1117/12.2052818
KEYWORDS: Aluminum nitride, Sputter deposition, Protactinium, Thin films, Transmittance, Titanium, Silicon, Silicon films, Scanning electron microscopy, Copper
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top