Zhen Liu
at Shanghai Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 16, 2013
Proc. SPIE. 9068, Eighth International Conference on Thin Film Physics and Applications
KEYWORDS: Thin films, Titanium, Sputter deposition, Copper, Silicon, Scanning electron microscopy, Silicon films, Transmittance, Aluminum nitride, Protactinium

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