Dr. Zhengchun Liu
at Zhuzhou Inst of Tech
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 23 December 2003
Proc. SPIE. 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III
KEYWORDS: Lithography, Moire patterns, Optical lithography, Radon, Glasses, Molecules, Reliability, Distortion, Molecular interactions, Information operations

Proceedings Article | 17 January 2003
Proc. SPIE. 4982, Microfluidics, BioMEMS, and Medical Microsystems
KEYWORDS: Polyurethane, Statistical analysis, Glasses, Molecules, Hydrogen, Electron microscopes, Scanning electron microscopy, Solids, Epoxies, Molecular electronics

Proceedings Article | 15 October 2001
Proc. SPIE. 4601, Micromachining and Microfabrication Process Technology and Devices

Proceedings Article | 15 October 2001
Proc. SPIE. 4601, Micromachining and Microfabrication Process Technology and Devices

Proceedings Article | 15 October 2001
Proc. SPIE. 4601, Micromachining and Microfabrication Process Technology and Devices

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