Dr. Zhengkun Liu
at Univ of Science and Technology of China
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 31 October 2016
Proc. SPIE. 10022, Holography, Diffractive Optics, and Applications VII
KEYWORDS: Lithography, Electron beam lithography, Diffraction, Antireflective coatings, Glasses, Interfaces, Reflectivity, Near field, Photomasks, Stray light

Proceedings Article | 31 October 2016
Proc. SPIE. 10022, Holography, Diffractive Optics, and Applications VII
KEYWORDS: Lithography, Electron beam lithography, Diffraction, Optical design, Electron beams, Silica, X-rays, Photoresist materials, Photomasks, X-ray lithography

Proceedings Article | 28 October 2016
Proc. SPIE. 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Lithium, Etching, Quartz, Chemical species, Sputter deposition, Ions, Photoresist materials, Monte Carlo methods, Ion beams, Diffraction gratings

Proceedings Article | 24 October 2016
Proc. SPIE. 9682, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes
KEYWORDS: Diffraction, Silica, Etching, Polymers, Remote sensing, Reflectivity, Wavefronts, Space telescopes, Fresnel lenses, Liquids

SPIE Journal Paper | 12 October 2016
OE Vol. 55 Issue 10
KEYWORDS: Sensors, Position sensors, Diffraction gratings, Computer programming, Demodulation, Optical sensors, Optical fibers, Signal detection, Optical engineering, Signal processing

Showing 5 of 11 publications
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