A low-cost deformable mirror (DM) driven by an underlying piezoelectric buzzer array though connection struts is proposed. Piezoelectric buzzer is a very low cost device that is easily commercial available. A numerical model of piezoelectric buzzer was built to predict the displacement of the actuator. The fabrication process without complicated technology was developed. Finally, a DM with 19 actuators arranged hexagonally was fabricated.
A water-cooled unimorph deformable mirror (DM) is proposed for high-power laser applications. The piezoelectric actuators are distributed around the correction area on the front side of the DM. The cooling water flows through the back side of the DM. This design realizes the physical separation between the electrical connections and cooling medium. It is important to optimize the structure of the designed water-cooled DM. First, a model of the DM was established using finite element method (FEM) to predict the deformation behavior of single actuator and the reconstruction of the DM. Then the comparison analysis of different apertures, radii and thicknesses were performed for structure optimization. The simulation results indicate that: The reconstructing precision of the DM is better than 98% for the typical low-order aberrations with relative large amplitude under the voltage range from -50V to +50V, which is suitable for high-power laser beam shaping.