Zhengyu Miao
at Louisiana State Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 16 February 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Lithography, MATLAB, Microlens array, Etching, Ultraviolet radiation, 3D modeling, Scanning electron microscopy, Process control, Microlens, Photoresist processing

Proceedings Article | 14 February 2011
Proc. SPIE. 7930, MOEMS and Miniaturized Systems X
KEYWORDS: Optical components, Lithography, Mirrors, Microlens array, Polymers, Ultraviolet radiation, Microlens, Micromirrors, Photomasks, Optical interconnects

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