The wide utilisation of micro-systems has brought increasing attention into micro-fluidics in recent years. When the size and mass of a device are scaled down, forces which used to be ignored may become dominant in the performance of a micro system. This paper studies the behaviour of fluid responding to travelling sinusoidal waves imposed by a micro actuator. The thickness of the fluid between the wave surface and the substrate is 20 microns, and the wavelength is 50 microns. The model is developed and implemented in ANSYS. The nonlinearities of the flow exist in both X and Y directions. A stable thrust force can be generated by the moving waves. The direction of the thrust force is opposite to the direction of the travelling wave. The magnitude of the thrust force is related to fluid viscosity, wave amplitude, and wave frequency. As this force is highly predictable and controllable, it can be used to propel a micro device working in thin tubes filled with fluid. The principle could also be applied to non-Newtonian fluid, although the flow will be more complicate.
This paper presents a novel ultrasonic transducer which can be used as a liquid ejector to release drug. The ultrasonic transducer is based on the design of a flextensional transducer, which is composed of interdigital piezoelectric rings and a vibration membrane. The device works at an axisymmetric resonant mode to produce maximum amplitude at the center of the vibration membrane in axial direction. For the usage of multi piezoelectric rings, the flexural plate waves can be generated by applying two out-of-phase signals. The power consumption is of primary importance in the design of this device and the usage of single-ring or multi-ring piezoelectric material instead of bulk piezo material can therefore reduce the power consumption. An optimum working frequency, at which least power is required by the device, can be found by the piezoelectric, coupled field capability of the ANSYS/Multiphysics product.