Zhenyu Chen
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 6, 2015
Proc. SPIE. 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Actuators, Lithography, Iron, Detection and tracking algorithms, Data modeling, Digital filtering, Magnetism, Instrumentation engineering, Structural design, Performance modeling

PROCEEDINGS ARTICLE | March 6, 2015
Proc. SPIE. 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Lithography, Surface plasmons, Safety, Amplifiers, Control systems, 3D modeling, Instrumentation engineering, Mechanical engineering, Semiconducting wafers, Protactinium

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