Zhenyu Chen
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 6 March 2015
Proc. SPIE. 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Data modeling, Magnetism, Performance modeling, Structural design, Lithography, Actuators, Iron, Instrumentation engineering, Detection and tracking algorithms, Digital filtering

Proceedings Article | 6 March 2015
Proc. SPIE. 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Safety, Semiconducting wafers, Lithography, Control systems, Surface plasmons, 3D modeling, Instrumentation engineering, Amplifiers, Protactinium, Mechanical engineering

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