In this paper, long range surface plasmon devices using metallic subwavelength gratings are experimentally
demonstrated. Subwavelength gold gratings are fabricated with deep UV interference lithography. Long range surface
plasmon device using these subwavelength gold gratings is characterized by measuring the surface plasmon resonance
reflectance curve in an attenuated total reflection setup. Surface plasmon resonance curve with approximately ten times
narrower angular width than that from long range surface plasmon propagating along metallic thin films has been
Simultaneous detection of intensity and polarization at the pixel-level has many important applications in the mid-infrared
region. In this work a large-format aluminum wire grid micro polarizer array has been fabricated and tested on
silicon substrates. The arrays were made on 150mm silicon wafers using a 193nm deep-UV stepper, with each array
spanning over 1-million pixels. A unique multilayer design and a large-area nanoscale projection lithography combined
with high-aspect ratio wire-grid structures were utilized to achieve optimum extinction coefficient and transmission.
Measured extinction coefficients on test samples exceeded 30-dB, with maximum transmission around 90%. These
arrays could be designed to match the focal-plane array geometry for integration with mid-IR imagers.