Mr. Zhian Guo Profile

Zhian Guo

at KLA Corp

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 23 September 2009 Paper

SMO photomask inspection in the lithographic plane

Emily Gallagher, Karen Badger, Yutaka Kodera, Jaione Tirapu Azpiroz, Ioana Graur, Scott Halle, Kafai Lai, Gregory McIntyre, Mark Wihl, Shaoyun Chen, Ge Cong, Bo Mu, Zhian Guo, Aditya Dayal

Proceedings Volume 7488, 748807 (2009) https://doi.org/10.1117/12.830668

KEYWORDS: Photomasks, Inspection, Source mask optimization, Semiconducting wafers, Lithography, Manufacturing, Binary data, Reticles, Image processing, Image resolution

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Proceedings Article | 2 June 2003 Paper

Energy flux method for inspection of contact and VIA layer reticles

Hector Garcia, William Volk, Yalin Xiong, Sterling Watson, Zongchang Yu, Zhian Guo, Lantian Wang

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.504577

KEYWORDS: Inspection, Reticles, Defect detection, Critical dimension metrology, Semiconducting wafers, Image segmentation, Lithography, Detection and tracking algorithms, Defect inspection, Algorithm development

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Proceedings Article | 27 December 2002 Paper

Energy flux method for die-to-database inspection of critical layer reticles

Hector Garcia, William Volk, Yalin Xiong, Sterling Watson, Zongchang Yu, Zhian Guo, Lantian Wang

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.468207

KEYWORDS: Inspection, Reticles, Defect detection, Semiconducting wafers, Critical dimension metrology, Photomasks, Lithography, Defect inspection, Databases, Algorithm development

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