Dr. Zhihong Mai
at GLOBALFOUNDRIES Singapore
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 12, 2005
Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV
KEYWORDS: Infrared imaging, Polishing, Etching, Silicon, Laser irradiation, Infrared radiation, Wet etching, Chemical reactions, Infrared photography, Chemical lasers

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