Dr. Zhijun Fang
at Shanghai Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 29 November 2000
Proc. SPIE. 4086, Fourth International Conference on Thin Film Physics and Applications
KEYWORDS: Thin films, Methane, Diamond, Etching, Ceramics, Ions, Hydrogen, Chemical vapor deposition, Microwave radiation, Plasma

Proceedings Article | 29 November 2000
Proc. SPIE. 4086, Fourth International Conference on Thin Film Physics and Applications
KEYWORDS: Diamond, Luminescence, Crystals, Silicon, Chemical vapor deposition, Atomic force microscopy, Raman spectroscopy, Silicon films, Picosecond phenomena, Plasma

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