Dr. Zhijun Zhang
at Univ of Science and Technology of China
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | January 4, 2008
Proc. SPIE. 6831, Nanophotonics, Nanostructure, and Nanometrology II
KEYWORDS: Gold, Lithography, Nanostructures, Iron, Etching, Magnetism, Oxygen, Cobalt, Tantalum, Nanolithography

PROCEEDINGS ARTICLE | November 21, 2007
Proc. SPIE. 6827, Quantum Optics, Optical Data Storage, and Advanced Microlithography
KEYWORDS: Polymethylmethacrylate, Polymers, Glasses, Ultraviolet radiation, Silicon, Scanning electron microscopy, Transmittance, Semiconducting wafers, Wafer bonding, Nanolithography

PROCEEDINGS ARTICLE | November 21, 2007
Proc. SPIE. 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Lithography, Iron, Etching, Sputter deposition, Magnetism, Cobalt, Photoresist materials, Ion beams, Tantalum, X-ray magnetic circular dichroism

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