Prof. Zhili Hao
at Old Dominion Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7291, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009
KEYWORDS: Biosensing, Sensors, Silicon, Wave plates, Transducers, Integrated circuits, Wave sensors, Acoustics, Electronic circuits, Integrated circuit design

PROCEEDINGS ARTICLE | March 30, 2009
Proc. SPIE. 7292, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2009
KEYWORDS: Microelectromechanical systems, Polarization, Sensors, Electrodes, Silicon, Transducers, Gyroscopes, Semiconducting wafers, Signal detection, Prototyping

PROCEEDINGS ARTICLE | March 30, 2009
Proc. SPIE. 7292, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2009
KEYWORDS: Mathematical modeling, Data modeling, Computer simulations, Wave propagation, Transducers, Finite element methods, Gyroscopes, Signal detection, HF etching, Thermal modeling

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