In high-power laser system, in order to extend the components' service life and reduce the operation costs, more
attentions should be pay at the research for damages ablation at multi-layer optical components and other high load
optical components. 240ps, 35ps, 6ps 1053nm laser pulses has been used to investigate damage ablation and damage
resistant experiments at 0° high reflection films. By comparing the damage morphology and damage resistant threshold
of the ablation pits at different pulses width, it was superior to use ultra-short pulse to repair multi-layers optical
components. It was found that the shorter pulse width has been used, the higher the damage resistant threshold and the
lower the laser modulation. Furthermore, the finite-difference time-domain method was used to simulate the
electric-field intensification within the large size damage region of multilayer films.