Dr. Zhiqiang Li
Research Scientist at Nanometrics Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Metrology, Light emitting diodes, Luminescence, Photons, Manufacturing, Physics, Process control, Spatial resolution, Metalorganic chemical vapor deposition, Semiconducting wafers

Proceedings Article | 3 February 2009
Proc. SPIE. 7231, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XIII
KEYWORDS: Metrology, Quantum wells, Light emitting diodes, Luminescence, Indium, Electroluminescence, Gallium nitride, Indium gallium nitride, Green light emitting diodes, Semiconducting wafers

Proceedings Article | 1 March 2006
Proc. SPIE. 6106, Photon Processing in Microelectronics and Photonics V
KEYWORDS: Contamination, Particles, Luminescence, Germanium, Silicon, Inspection, Nondestructive evaluation, Process control, Transistors, Semiconducting wafers

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