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Zhixi Chen
at Siemens EDA
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 23 March 2020 Paper
VIA design optimization for fast yield ramping in advanced nodes
Proceedings Volume 11328, 1132814 (2020) https://doi.org/10.1117/12.2551683
KEYWORDS: Metals, Design for manufacturing, Manufacturing, Particles, Yield improvement, Design for manufacturability, Roads, Polishing, Photomasks, Integrated circuit design
Proceedings Article | 23 March 2020 Paper
An efficient way to accelerate litho hotspot checking
Proceedings Volume 11328, 1132818 (2020) https://doi.org/10.1117/12.2551682
KEYWORDS: Lithography, Design for manufacturing, Manufacturing, Computer simulations, Databases
Proceedings Article | 23 March 2020 Paper
A comprehensive standard cell library qualification to prevent lithographic challenges
Proceedings Volume 11328, 113281C (2020) https://doi.org/10.1117/12.2551677
KEYWORDS: Lithography, Standards development, Databases, Photomasks, Statistical analysis, Visualization, Roads, Optics manufacturing, Computer simulations, Metals
Proceedings Article | 23 March 2020 Paper
CMP simulation-based dummy fill optimization
Proceedings Volume 11328, 1132817 (2020) https://doi.org/10.1117/12.2551681
KEYWORDS: Chemical mechanical planarization, Manufacturing, Optimization (mathematics), Copper, Design for manufacturing, Lithography, Modeling and simulation, Product engineering, Semiconducting wafers, Model-based design
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