Dr. Zhixiang Liu
at Institute of Optics and Electronics CAS
SPIE Involvement:
Publications (5)

SPIE Journal Paper | 23 February 2018
OE Vol. 57 Issue 02
KEYWORDS: Wavefronts, Sensors, Diffraction gratings, Error analysis, Diffraction, Wavefront aberrations, Distortion, Calibration, Fourier transforms, Manufacturing

Proceedings Article | 24 September 2015
Proc. SPIE. 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
KEYWORDS: Microscopes, Diffraction, Optical design, Phase shifting, Fourier transforms, Interferometry, Wavefronts, Objectives, Diffraction gratings, Shearing interferometers

Proceedings Article | 5 November 2014
Proc. SPIE. 9272, Optical Design and Testing VI
KEYWORDS: Microscopes, Diffraction, Fourier transforms, Interferometry, Wavefronts, Zernike polynomials, Objectives, Diffraction gratings, Wavefront metrology, Shearing interferometers

Proceedings Article | 13 May 2013
Proc. SPIE. 8789, Modeling Aspects in Optical Metrology IV
KEYWORDS: Prisms, Electronics, Phase shifting, Metrology, Spatial frequencies, Error analysis, Interferometry, Optical testing, Zernike polynomials, Testing and analysis

Proceedings Article | 15 October 2012
Proc. SPIE. 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
KEYWORDS: Photovoltaics, Monochromatic aberrations, Imaging systems, Interferometers, Error analysis, Interferometry, Wavefronts, Optical testing, Zernike polynomials, Wavefront analysis

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