Dr. Zhiya Dang
at National Univ of Singapore
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | November 13, 2014
Proc. SPIE. 9277, Nanophotonics and Micro/Nano Optics II
KEYWORDS: Mid-IR, Etching, Ions, Silicon, Photonic crystals, Scanning electron microscopy, Ion beams, Silicon photonics, Neodymium, Semiconducting wafers

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