Dr. Zhongping Fang
Senior Scientist at Singapore Institute of Manufacturing Technology
SPIE Involvement:
Author
Publications (22)

SPIE Journal Paper | June 1, 2011
JBO Vol. 16 Issue 06
KEYWORDS: Microfluidics, Interfaces, Inspection, Optical coherence tomography, Tomography, Plasma, Adhesives, Signal to noise ratio, Signal detection, Oxygen

PROCEEDINGS ARTICLE | April 2, 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Lithography, Sensors, Spectroscopy, Manufacturing, Resistance, Photoresist materials, Process control, Critical dimension metrology, Photoresist processing, Semiconducting wafers

PROCEEDINGS ARTICLE | June 17, 2009
Proc. SPIE. 7390, Modeling Aspects in Optical Metrology II
KEYWORDS: Optical components, Zemax, Inspection, Zinc, Wavefront sensors, Wavefronts, Zernike polynomials, Helium neon lasers, Optics manufacturing, Light wave propagation

PROCEEDINGS ARTICLE | October 3, 2008
Proc. SPIE. 7155, Ninth International Symposium on Laser Metrology
KEYWORDS: Optical components, Optical design, Light sources, Image processing, Manufacturing, Wavefront sensors, Wavefronts, Wave propagation, Bridges, Spherical lenses

PROCEEDINGS ARTICLE | April 25, 2008
Proc. SPIE. 6993, MEMS, MOEMS, and Micromachining III
KEYWORDS: Confocal microscopy, Microfluidics, Polymethylmethacrylate, Polymers, Glasses, Silicon, Manufacturing, Scanning electron microscopy, Process control, Measurement devices

PROCEEDINGS ARTICLE | June 18, 2007
Proc. SPIE. 6616, Optical Measurement Systems for Industrial Inspection V
KEYWORDS: Optical design, Microlens array, Sensors, Wavefront sensors, Wavefronts, Optical testing, Spatial light modulators, Geometrical optics, Spherical lenses, Surface finishing

Showing 5 of 22 publications
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