Prof. Zhongsheng Lai Profile

Prof. Zhongsheng Lai

at East China Normal Univ

SPIE Involvement:

Author

Publications (19)

Proceedings Article | 8 December 2004 Paper

High-isolation contact switch in MEMS phase shifter

Wei Li, Yanling Shi, Jian Qing, Ling Jiang, Zheng Ren, Peisheng Xin, Ziqiang Zhu, Zongshen Lai

Proceedings Volume 5774, (2004) https://doi.org/10.1117/12.607790

KEYWORDS: Microelectromechanical systems, Switches, Phase shifts, Bridges, Silicon, Signal attenuation, Electrodes, Aluminum, Reliability, Gold

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Proceedings Article | 8 December 2004 Paper

Transfer bonding of thick silicon nitride film via split of porous silicon

X. Bao, Yan Ding, Yu Chen, Ping Guo, Yan Shi, Lian Wang, Zong Lai

Proceedings Volume 5774, (2004) https://doi.org/10.1117/12.607898

KEYWORDS: Silicon, Silicon films, Glasses, Epoxies, Plasma enhanced chemical vapor deposition, Signal attenuation, Thin films, Crystals, Wafer bonding, Infrared radiation

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Proceedings Article | 8 December 2004 Paper

Optimized inductor and low-pass filter with low substrate loss on OPS/PS interlayer

Yun Liu, Yanling Shi, Xiao Feng, Yong Wang, Shaoqiang Chen, Xiaojin Li, Ziqiang Zhu, Zongshen Lai

Proceedings Volume 5774, (2004) https://doi.org/10.1117/12.607442

KEYWORDS: Silicon, Linear filtering, Picosecond phenomena, Metals, Lawrencium, Semiconducting wafers, Inductance, Microwave radiation, Integrated circuits, Circuit switching

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Proceedings Article | 8 December 2004 Paper

Failure analysis of MEMS RF cantilevered beam switch

Fangmin Guo, Xin Xu, Chengshi Li, Yuping Ge, Jianguo Yu, Peisheng Xin, Rongjin Zhu, Zongshen Lai, Ziqiang Zhu, Wei Lu

Proceedings Volume 5774, (2004) https://doi.org/10.1117/12.607393

KEYWORDS: Switches, Failure analysis, Microelectromechanical systems, Gold, Physics, Switching, Information operations, Modulators, Silicon, Solid state electronics

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Proceedings Article | 8 December 2004 Paper

Formation of the copper nanoparticles in porous silicon by electroplating

Xiao Feng, Shaohui Xu, Shaoqiang Chen, Jianzhong Zhu, Ziqiang Zhu, Zongshen Lai

Proceedings Volume 5774, (2004) https://doi.org/10.1117/12.607806

KEYWORDS: Picosecond phenomena, Copper, Silicon, Metals, Electroplating, Raman spectroscopy, Crystals, Scanning electron microscopy, Microcrystalline materials, Etching

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Proceedings Article | 8 December 2004 Paper

Research for polyimide as a sacrificial layer in MEMS device

Meili Hu, Jinjin Chen, Zhongshen Lai, Huibing Mao, Dexin Sheng

Proceedings Volume 5774, (2004) https://doi.org/10.1117/12.608035

KEYWORDS: Etching, Microelectromechanical systems, Silicon, Switches, Photography, Liquids, Dry etching, Microwave radiation, Wet etching, Bridges

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Proceedings Article | 8 December 2004 Paper

Index-compatible design of multilayer film for MEMS-type variable optical attenuator

Deyan Peng, Guodong Li, Lianwei Wang, Zongshen Lai

Proceedings Volume 5774, (2004) https://doi.org/10.1117/12.607904

KEYWORDS: Fabry–Perot interferometers, Silicon films, Reflection, Silicon, Variable optical attenuators, Thin films, Optical design, Refractive index, Optical alignment, Structural design

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Proceedings Article | 8 December 2004 Paper

Numerical analysis of pull-in voltage for contact MEMS switches in switched-line phase shifter application

Ling Jiang, Yanling Shi, Wei Li, Yanfang Ding, Zongshen Lai, Ziqiang Zhu

Proceedings Volume 5774, (2004) https://doi.org/10.1117/12.607900

KEYWORDS: Microelectromechanical systems, Switches, Bridges, Phase shifts, Electrodes, Numerical analysis, Capacitors, Actuators, Differential equations, Dielectrics

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Proceedings Article | 8 December 2004 Paper

Study on DC-contact MEMS switches

J. Chen, H. Wei, M. Hu, Zong Lai

Proceedings Volume 5774, (2004) https://doi.org/10.1117/12.607901

KEYWORDS: Switches, Bridges, Microelectromechanical systems, Aluminum, Silicon, Electrodes, Microwave radiation, Signal attenuation, Resistance, Waveguides

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Proceedings Article | 28 September 2001 Paper

Improved microwave performance on low-resistivity Si substrates by introducing an oxidized porous Si interlayer

Ziqiang Zhu, Yanling Shi, Yongfu Long, Peisheng Xin, Zongsheng Lai

Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442977

KEYWORDS: Silicon, Microwave radiation, Micromachining, Dielectrics, Waveguides

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Proceedings Article | 28 September 2001 Paper

Design and fabrication of micromachined microwave transmission lines

Yanling Shi, Zongsheng Lai, Peisheng Xin, Li Shao, Ziqiang Zhu

Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442983

KEYWORDS: Microwave radiation, Silicon, Waveguides, Analytical research, Micromachining, CMOS technology, Finite element methods, Microelectromechanical systems, Surface micromachining, Bulk micromachining

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Proceedings Article | 14 September 2001 Paper

Effective dielectric-constant measurement for micromachined transmission line with multiline method

Shuzhen You, Yanling Shi, Zongsheng Lai, Ziqiang Zhu

Proceedings Volume 4414, (2001) https://doi.org/10.1117/12.440143

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Proceedings Article | 14 September 2001 Paper

Theoretical study of surface MEMS rf switch structure

Ming Jia, Fangmin Guo, Ziqiang Zhu, Zongsheng Lai, Jianpeng Chu, Yaolin Wang, Xiaohong Ge, Yirong Yang

Proceedings Volume 4414, (2001) https://doi.org/10.1117/12.440199

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Proceedings Article | 14 September 2001 Paper

Stress relaxation of the micromachined coplanar waveguide

Yanling Shi, Zongsheng Lai, Peisheng Xin

Proceedings Volume 4414, (2001) https://doi.org/10.1117/12.440196

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Proceedings Article | 14 September 2001 Paper

Surface-micromachined miniature rf switch

Fangmin Guo, Zongsheng Lai, Ziqiang Zhu, Zhong Fan, Yongfu Long, Gen Yang, Xiaohong Ge, Siqin Chen, Jianfang Xie

Proceedings Volume 4414, (2001) https://doi.org/10.1117/12.440198

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Proceedings Article | 9 May 2000 Paper

Micromechanical optical modulator

Huibing Mao, Jinghua Ke, Zongsheng Lai

Proceedings Volume 4077, (2000) https://doi.org/10.1117/12.385615

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Proceedings Article | 23 September 1996 Paper

Application of porous Si micromachining technology in the calorimetric sensor

Zongsheng Lai, Xinjun Wan, Pingsong Zhou, Yunzhen Wang

Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251225

KEYWORDS: Silicon, Sensors, Resistors, Micromachining, Semiconducting wafers, Silicon films, Bridges, Resistance, Thin films, Microsensors

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Proceedings Article | 26 October 1994 Paper

Modification of oxygen-doped polysilicon using ion implantation

Yun Wang, Jian Hu, Zongsheng Lai, Dezhang Zhu, Jianqin Cao, Jinlong Xu

Proceedings Volume 2364, (1994) https://doi.org/10.1117/12.190742

KEYWORDS: Oxygen, Resistance, Hydrogen, Arsenic, Ion implantation, Annealing, Ions, Chemical species, Boron, Temperature metrology

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Proceedings Article | 26 October 1994 Paper

Study of the selectivity of porous silicon formation

Xinjun Wan, Yun Wang, Zongsheng Lai

Proceedings Volume 2364, (1994) https://doi.org/10.1117/12.190743

KEYWORDS: Silicon, Silicon films, Scanning electron microscopy, Photography, Doping, Semiconducting wafers, Etching, Surface micromachining, Boron, Annealing

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Showing 5 of 19 publications

Proceedings Volume Editor (1)

SPIE Conference Volume | 8 December 2004

Fifth International Conference on Thin Film Physics and Applications

Conference Committee Involvement (1)

Fifth International Conference on Thin Film Physics and Applications

31 May 2004 | Shanghai, China

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