Prof. Zhongyuan Ma
at Nanjing Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 11, 2008
Proc. SPIE. 6984, Sixth International Conference on Thin Film Physics and Applications
KEYWORDS: Electron beam lithography, Etching, Silicon, Oxygen, Scanning electron microscopy, Aluminum, Plasma etching, Reactive ion etching, Nanolithography, Plasma

PROCEEDINGS ARTICLE | March 11, 2008
Proc. SPIE. 6984, Sixth International Conference on Thin Film Physics and Applications
KEYWORDS: Nanostructures, Visible radiation, Annealing, Luminescence, Crystals, Silicon, Laser irradiation, Silicon films, Laser crystals, Nanolithography

PROCEEDINGS ARTICLE | December 8, 2004
Proc. SPIE. 5774, Fifth International Conference on Thin Film Physics and Applications
KEYWORDS: FT-IR spectroscopy, Annealing, Luminescence, Silicon, Hydrogen, Argon ion lasers, Oxygen, Plasma enhanced chemical vapor deposition, Lead, Absorption

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