Mr. Xubo Zhu Profile

Xubo Zhu

at Luoyang Optoelectro Technology Development Ctr

SPIE Involvement:

Author

Publications (7)

Proceedings Article | 27 March 2022 Paper

Effects of different passivation and etching methods on the dark current of InAs/GaSb long-wave detectors

Zhenming Ji, Xubo Zhu, Yingjie He, Ailiang Cui, Peng Wei, Yanqiu Lyu

Proceedings Volume 12169, 1216983 (2022) https://doi.org/10.1117/12.2625096

KEYWORDS: Superlattices, Silicon, Etching, Infrared detectors, Sensors, Semiconducting wafers, Silicon films, Silica, Gallium antimonide, Wet etching

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Proceedings Article | 27 March 2022 Paper

Preparation and etching of the mask of the type II superlattice for focal plane arrays

Wen Wang, Dongying Wu, Xubo Zhu, Fei Tao, Yanqiu Lv

Proceedings Volume 12169, 121696B (2022) https://doi.org/10.1117/12.2624742

KEYWORDS: Etching, Superlattices, Refractive index, Silica, Plasma enhanced chemical vapor deposition, Ions, Molecules, Infrared detectors, Silicon films, Plasma

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Proceedings Article | 12 March 2021 Paper

Molecular beam epitaxial InSb infrared photodiode with low dark current

Xubo Zhu, Yanqiu Lyu, Zhenyu Peng, Xiancun Cao, Lixue Zhang, Guansheng Yao, Jiaxin Ding

Proceedings Volume 11763, 117630F (2021) https://doi.org/10.1117/12.2585696

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Proceedings Article | 5 November 2020 Paper

Inductively coupled plasma (ICP) dry etching of type II InAs/GaSb superlattice for focal plane arrays

Fei Tao, Xubo Zhu, JinChun Wang, Yingjie He, Jiaxin Ding, Guansheng Yao, Lixue Zhang, Xiancun Cao, Yanqiu Lv

Proceedings Volume 11565, 115650I (2020) https://doi.org/10.1117/12.2575638

KEYWORDS: Etching, Chlorine, Superlattices, Dry etching, Gallium antimonide, Sensors, Staring arrays, Plasma etching, Wet etching

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Proceedings Article | 11 September 2013 Paper

Infrared transmission characteristic of indium-tin-oxide thin films prepared by femtosecond pulsed laser deposition

Xubo Zhu, Weiguo Sun, Fei Tao, Xiancun Cao, Xiaolei Zhang

Proceedings Volume 8907, 89072X (2013) https://doi.org/10.1117/12.2033172

KEYWORDS: Infrared radiation, Oxygen, Resistance, Protactinium, Femtosecond phenomena, Thin films, Pulsed laser deposition, Microscopes, Transmittance, Sapphire

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Proceedings Article | 11 September 2013 Paper

Research on passivation of type II InAs/GaSb superlattice photodiodes

Lei Zhang, Li-xue Zhang, Xiang-wei Shen, Xu-bo Zhu, Zhen-yu Peng, Yan-qiu Lv, Jun-jie Si, Wei-guo Sun

Proceedings Volume 8907, 890731 (2013) https://doi.org/10.1117/12.2033223

KEYWORDS: Superlattices, Sensors, Photodiodes, Silica, Resistance, Sensor performance, Quantum efficiency, Zinc, Metals, Infrared detectors

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Proceedings Article | 15 October 2012 Paper

Effects of growing conditions on preparation of InSb thin films by femtosecond pulsed laser deposition

Xubo Zhu, Weiguo Sun, Xiancun Cao, Xiaolei Zhang, Lixue Zhang, Fei Tao

Proceedings Volume 8419, 841915 (2012) https://doi.org/10.1117/12.975263

KEYWORDS: Thin films, Laser energy, Crystals, Infrared radiation, Pulsed laser deposition, Femtosecond phenomena, Scanning electron microscopy, Pulsed laser operation, Particles, Sapphire

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Showing 5 of 7 publications

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