Zidong Li
at Univ of Michigan
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 6 March 2014
Proc. SPIE. 8976, Microfluidics, BioMEMS, and Medical Microsystems XII
KEYWORDS: Lithography, Microfluidics, Optical lithography, Etching, Glasses, Robotics, Oxygen, Computer aided design, Rapid manufacturing, Liquids

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