Zigang Xiao
at Univ of Illinois
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Semiconductors, Lithography, Electron beam lithography, Optical lithography, Manufacturing, Photomasks, Double patterning technology, Immersion lithography, Vestigial sideband modulation, Optical power tracking algorithms

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Electron beam lithography, Lithium, Optical lithography, Annealing, Manufacturing, Directed self assembly, Optimization (mathematics), Baryon acoustic oscillations, Standards development

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Manufacturing, Printing, Directed self assembly, Integrated circuits, Extreme ultraviolet lithography, Integrated circuit design, Yield improvement

PROCEEDINGS ARTICLE | September 9, 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Manufacturing, Scanning electron microscopy, Printing, Photomasks, Directed self assembly, Mask making, Baryon acoustic oscillations

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