Dr. Ziqiang John Mao
Program Manager at Intel Corp
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | April 1, 2007
JM3 Vol. 6 Issue 02
KEYWORDS: Feedback control, Process control, Control systems, Device simulation, Filtering (signal processing), Manufacturing, Data modeling, Process modeling, Semiconductor manufacturing, Systems modeling

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Control systems, Data processing, Process control, Dynamical systems, Feedback control, Performance modeling, Systems modeling, Filtering (signal processing), Process modeling, Device simulation

PROCEEDINGS ARTICLE | May 17, 2005
Proc. SPIE. 5755, Data Analysis and Modeling for Process Control II
KEYWORDS: Mathematical modeling, Optical lithography, Data modeling, Manufacturing, Control systems, Process control, Critical dimension metrology, Feedback control, Systems modeling, Device simulation

PROCEEDINGS ARTICLE | April 29, 2004
Proc. SPIE. 5378, Data Analysis and Modeling for Process Control
KEYWORDS: Metrology, Data modeling, Error analysis, Manufacturing, Control systems, Signal processing, Semiconducting wafers, Systems modeling, Overlay metrology, Model-based design

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