Dr. Zoran Jandric
at Zyvex Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
KEYWORDS: Microelectromechanical systems, Lithography, Manufacturing, 3D modeling, Scanning electron microscopy, Autocollimators, Modal analysis, Finite element methods, Connectors, Assembly tolerances

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