Dr. Amyn A. Poonawala
R&D Engineer
SPIE Involvement:
Author
Area of Expertise:
ILT (Inverse Lithography Technology) , Mask Synthesis
Publications (2)

PROCEEDINGS ARTICLE | September 30, 2009
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Mathematical modeling, Lithography, Atrial fibrillation, Data modeling, Imaging systems, Manufacturing, Printing, Photomasks, Optical proximity correction, Optimization (mathematics)

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Optical lithography, Atrial fibrillation, Data modeling, 3D modeling, Printing, Solids, Photomasks, Optical proximity correction, Model-based design, Process modeling

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