Dr. Ankit Vora
at Facebook Reality Labs
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 25 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Semiconductors, Lithography, Etching, Polymers, Silicon, Manufacturing, Oxygen, Line width roughness, Directed self assembly, Line edge roughness, Plasma

Proceedings Article | 21 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Thin films, Lithography, Polymethylmethacrylate, Polymers, Spectroscopy, Diffusion, Magnetism, Carbonates, Adsorption, Polymerization, Picosecond phenomena, Chromatography, Rhodium, Molecular self-assembly, Liquids

Proceedings Article | 20 March 2015 Paper
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Thin films, Etching, Dry etching, Polymers, Annealing, Coating, Scanning electron microscopy, Directed self assembly, Plasma etching, Photomicroscopy

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