Aodong He
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 January 2013
Proc. SPIE. 8782, 2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage
KEYWORDS: Polishing, Etching, Germanium, Resistance, Corrosion, Chemical elements, Antimony, Tellurium, Temperature metrology, Chemical mechanical planarization

Proceedings Article | 24 January 2013
Proc. SPIE. 8782, 2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage
KEYWORDS: Optical lithography, Etching, Interfaces, Scanning electron microscopy, Signal processing, Emission spectroscopy, Process control, Signal detection, Bromine, Plasma

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