Ari Song
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 14 March 2016
Proc. SPIE. 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX
KEYWORDS: Gold, Oxides, Lithography, Etching, Dry etching, Metals, Silicon, Diffusion, Silver, Manufacturing, Surface roughness, Wet etching, Anisotropic etching, Nanowires

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