Dr. Bahram Azizollah Ganji
at Babol Noshirvani Univ of Technology
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 13 May 2020
JM3 Vol. 19 Issue 02
KEYWORDS: Microelectromechanical systems, Mathematical modeling, Silicon, Capacitance, Crystals, Protactinium, Capacitors, Finite element methods, Systems modeling, Device simulation

SPIE Journal Paper | 12 February 2018
JM3 Vol. 17 Issue 01
KEYWORDS: Semiconducting wafers, Silicon, Microelectromechanical systems, Etching, Photomasks, Acoustics, Photoresist materials, Oxides, Dry etching, Wet etching

SPIE Journal Paper | 1 April 2009
JM3 Vol. 8 Issue 02
KEYWORDS: Microelectromechanical systems, Aluminum, Acoustics, Etching, Capacitance, Finite element methods, Silicon, Scanning electron microscopy, Electrodes, Mechanical sensors

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top