Dr. Baoxi Yang Profile

Dr. Baoxi Yang

at Shanghai Institute of Optics and Fine Mechanics

SPIE Involvement:

Author

Publications (8)

Proceedings Article | 9 October 2021 Poster + Paper

Design of linear dispersion spectral confocal objective lens with wide measurement range

Niuhu Wang, Aijun Zeng, Wenqing Jiang, Baoxi Yang

Proceedings Volume 11895, 1189516 (2021) https://doi.org/10.1117/12.2601994

KEYWORDS: Objectives, Confocal microscopy, Sensors, Glasses, Spectroscopy, Monochromatic aberrations, Refractive index, Lens design, Image resolution, Microscopes

Read Abstract +

Proceedings Article | 5 November 2020 Paper

Processing parameters optimization algorithm design and verification of suppress subsurface damage based on gradient algorithm

Donglong Lin, Baoxi Yang, Huijie Huang, Yan Xing, Chiliang Zhang

Proceedings Volume 11568, 115681Z (2020) https://doi.org/10.1117/12.2580347

KEYWORDS: Optimization (mathematics), Optics manufacturing, Silica, Surface roughness, Mechanics, Abrasives, Surface finishing, Process modeling

Read Abstract +

Proceedings Article | 5 November 2020 Paper

Effects of mid-spatial frequency surface error on pupil characteristic parameters in lithography illumination system

Shuang Gong, Baoxi Yang, Huijie Huang

Proceedings Volume 11568, 1156820 (2020) https://doi.org/10.1117/12.2580348

KEYWORDS: Lithographic illumination, Error analysis, Lithography, Surface finishing, Photomasks, Manufacturing, Aspheric lenses

Read Abstract +

Proceedings Article | 24 July 2018 Paper

Study on the highly intelligent uniformity correction and the application for lithography

Weilin Cheng, Fang Zhang, Dongliang Lin, Aijun Zeng, Baoxi Yang, Huijie Huang

Proceedings Volume 10827, 108272H (2018) https://doi.org/10.1117/12.2326837

KEYWORDS: Lithographic illumination, Lithography, Reticles, Excimer lasers, Diffractive optical elements, Optical lithography, Projection systems

Read Abstract +

Proceedings Article | 5 August 2015 Paper

Accurate measurement of illumination uniformity using spot sensor based 2-dimension scanning method

Chengke Xie, Ming Chen, Youbao Zhang, Xinghua Ma, Baoxi Yang, Huijie Huang

Proceedings Volume 9621, 96210O (2015) https://doi.org/10.1117/12.2192536

KEYWORDS: Sensors, Lithographic illumination, Fiber optic illuminators, Excimer lasers, Lithography, Deep ultraviolet, Laser applications, Pulsed laser operation, CCD cameras, Critical dimension metrology

Read Abstract +

Proceedings Article | 19 December 2013 Paper

Off-line inspection method of microlens array for illumination homogenization in DUV lithography machine

Fang Zhang, Jing Zhu, Baoxi Yang, Lihua Huang, Xiaobang Hu, Yanfen Xiao, Huijie Huang

Proceedings Volume 9046, 904619 (2013) https://doi.org/10.1117/12.2037841

KEYWORDS: Lithographic illumination, Lithography, Inspection, Microlens array, Homogenization, Optical simulations, Diffraction, Excimer lasers, Deep ultraviolet, CCD cameras

Read Abstract +

Proceedings Article | 23 August 2013 Paper

Design and simulation of double annular illumination mode for microlithography

Qiang Song, Jing Zhu, Baoxi Yang, Lei Liu, Jun Wang, Huijie Huang

Proceedings Volume 8911, 891105 (2013) https://doi.org/10.1117/12.2031650

KEYWORDS: Lithographic illumination, Double patterning technology, Lithography, Axicons, Polarization, Resolution enhancement technologies, Photomasks, Wave plates, Critical dimension metrology, Micro optics

Read Abstract +

Proceedings Article | 26 November 2012 Paper

Test of diffractive optical element for DUV lithography system using visible laser

Zhonghua Hu, Jing Zhu, Baoxi Yang, Yanfen Xiao, Aijun Zeng, Huijie Huang

Proceedings Volume 8557, 855709 (2012) https://doi.org/10.1117/12.999681

KEYWORDS: Diffractive optical elements, Deep ultraviolet, Lithography, Optical testing, Helium neon lasers, Charge-coupled devices, Lithographic illumination, Optical simulations, Laser systems engineering, Diffraction

Read Abstract +

Showing 5 of 8 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years