Dr. Baoxi Yang
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 5 November 2020 Paper
Proc. SPIE. 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing
KEYWORDS: Silica, Mechanics, Surface roughness, Abrasives, Optimization (mathematics), Optics manufacturing, Surface finishing, Process modeling

Proceedings Article | 5 November 2020 Paper
Proc. SPIE. 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing
KEYWORDS: Lithography, Lithographic illumination, Error analysis, Manufacturing, Aspheric lenses, Photomasks, Surface finishing

Proceedings Article | 24 July 2018 Paper
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Lithography, Reticles, Optical lithography, Lithographic illumination, Diffractive optical elements, Projection systems, Excimer lasers

Proceedings Article | 5 August 2015 Paper
Proc. SPIE. 9621, 2015 International Conference on Optical Instruments and Technology: Advanced Lasers and Applications
KEYWORDS: Lithography, Lithographic illumination, Deep ultraviolet, Sensors, Laser applications, CCD cameras, Excimer lasers, Critical dimension metrology, Pulsed laser operation, Fiber optic illuminators

Proceedings Article | 19 December 2013 Paper
Proc. SPIE. 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
KEYWORDS: Lithography, Diffraction, Homogenization, Microlens array, Lithographic illumination, Deep ultraviolet, Inspection, CCD cameras, Optical simulations, Excimer lasers

Showing 5 of 7 publications
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