As one of the most challenging problems in Computer Controlled Optical Surfacing (CCOS), the edge effect greatly affects the polishing accuracy and efficiency. CCOS rely on stable tool influence function (TIF), however, at the edge of the mirror surface,with the grinding head out of the mirror ,the contact area and pressure distribution changes, which resulting in a non-linear change of TIF, and leads to tilting or sagging at the edge of the mirror. In order reduce the adverse effects and improve the polishing accuracy and efficiency. In this paper, we used the finite element simulation to analyze the pressure distribution at the mirror edge and combined with the improved traditional method to establish a new model. The new method fully considered the non-uniformity of pressure distribution. After modeling the TIFs in different locations, the description and prediction of the edge effects are realized, which has a positive significance on the control and suppression of edge effects
When the noise in the surface error data given by the interferometer has no effect on the iterative convergence of the RL algorithm, the RL algorithm for deconvolution in image restoration can be applied to the CCOS model to solve the dwell time. By extending the initial error function on the edge and denoising the noise in the surface error data given by the interferometer , it makes the result more available . The simulation results show the final residual error 10.7912nm nm in PV and 0.4305 nm in RMS, when the initial surface error is 107.2414 nm in PV and 15.1331 nm in RMS. The convergence rates of the PV and RMS values can reach up to 89.9% and 96.0%, respectively . The algorithms can satisfy the requirement of fabrication very well.