Dr. Bo Tao Profile

Dr. Bo Tao

at Wuhan Univ of Science and Technology

SPIE Involvement:

Author

Publications (6)

SPIE Journal Paper | 24 January 2019

Polarization aberration analysis in lithographic tools

Shuang Xu, Bo Tao, Yongxing Guo, Gongfa Li

OE Vol. 58 Issue 08

KEYWORDS: Polarization, Lithography, Imaging systems, Distortion, Nanoimprint lithography, Optical engineering, Photomasks, Lithographic illumination, Zernike polynomials, Semiconducting wafers

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Proceedings Article | 15 November 2018

Separation of variables based method for fast calculation of imaging system in lithographic tools

Shuang Xu, Bo Tao, Yongxing Guo, Gongfa Li

Proc. SPIE. 10964, Tenth International Conference on Information Optics and Photonics

KEYWORDS: Optical imaging, Lithography, Optical lithography, Imaging systems, Image processing, Computer simulations, Photomasks, Optical proximity correction, Algorithm development, Resolution enhancement technologies

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Proceedings Article | 7 November 2018

Polarization aberration measurement of lithographic tools

Shuang Xu, Gongfa Li, Bo Tao, Yongxing Guo

Proc. SPIE. 10819, Optical Metrology and Inspection for Industrial Applications V

KEYWORDS: Lithography, Data modeling, Polarization, Imaging systems, Manufacturing, Distortion, Zernike polynomials

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Proceedings Article | 12 January 2018

Image based method for aberration measurement of lithographic tools

Shuang Xu, Bo Tao, Yongxing Guo, Gongfa Li

Proc. SPIE. 10620, 2017 International Conference on Optical Instruments and Technology: Optoelectronic Imaging/Spectroscopy and Signal Processing Technology

KEYWORDS: Lithography, Imaging systems, Wavefront aberrations, Distortion, Zernike polynomials, Image transmission, Photomasks, Reconstruction algorithms, Phase measurement, Systems modeling

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Proceedings Article | 10 January 2018

Numerical analysis of residual stresses reconstruction for axisymmetric glass components

Bo Tao, Shuang Xu, Honghui Yao

Proc. SPIE. 10616, 2017 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments

KEYWORDS: Phase shifting, Photoelasticity, Glasses, Error analysis, Nondestructive evaluation, Computer simulations, Numerical analysis, Finite element methods, Jones calculus

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Proceedings Article | 31 October 2016

An integrated solution for compression-molded glass lenses

Bo Tao, Ye Yuan, Xinlin Zhou, Hua Chen

Proc. SPIE. 10021, Optical Design and Testing VII

KEYWORDS: Refractive index, Mach-Zehnder interferometers, Lenses, Glasses, Annealing, Finite element methods, Charge-coupled devices, Precision glass molding, Glass molding, Liquids

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Showing 5 of 6 publications

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