Cathy Wang
at ASML Taiwan Ltd
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Target detection, Diffraction, Metrology, Switching, Sensors, Etching, Scanning electron microscopy, Semiconducting wafers, Overlay metrology, Diffraction gratings

Proceedings Article | 20 March 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Reticles, Deep ultraviolet, Scanners, Manufacturing, Distortion, Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Overlay metrology

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Polarization, Etching, Physics, Scanning electron microscopy, Monte Carlo methods, Signal processing, Semiconductor manufacturing, Semiconducting wafers, Overlay metrology

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Target detection, Wafer-level optics, Thin films, Diffraction, Metrology, Detection and tracking algorithms, Polarization, Image quality, Solids, Process control, Semiconducting wafers, Defense systems, Overlay metrology, Diffraction gratings

Proceedings Article | 19 March 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Target detection, Metrology, Etching, Scanners, Time metrology, Process control, Target acquisition, Semiconducting wafers, Overlay metrology, Back end of line

Proceedings Article | 10 April 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Diffraction, Metrology, Scanners, Time metrology, High volume manufacturing, Thin film coatings, Semiconducting wafers, Overlay metrology, Tin, Chemical mechanical planarization

Showing 5 of 14 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top