Dr. Chang Aucki Choi
at ETRI
SPIE Involvement:
Author
Publications (16)

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Sensors, Etching, Electrodes, Resistance, Capacitance, Deep reactive ion etching, Bulk micromachining

Proceedings Article | 12 November 2005
Proc. SPIE. 6007, Smart Medical and Biomedical Sensor Technology III
KEYWORDS: Gold, Plasmons, Refractive index, Prisms, Surface plasmons, Sensors, Polymers, Metals, Dielectrics, Multiplexing

Proceedings Article | 28 September 2001
Proc. SPIE. 4557, Micromachining and Microfabrication Process Technology VII
KEYWORDS: Oxides, CMOS sensors, Microfluidics, Sensors, Etching, Silicon, Thermoelectric materials, Surface micromachining, Liquids, Oxidation

Proceedings Article | 25 August 2000
Proc. SPIE. 4174, Micromachining and Microfabrication Process Technology VI
KEYWORDS: Oxides, Etching, Silicon, Plasma enhanced chemical vapor deposition, HF etching, Surface micromachining

Proceedings Article | 25 August 2000
Proc. SPIE. 4174, Micromachining and Microfabrication Process Technology VI
KEYWORDS: Microelectromechanical systems, Oxides, CMOS sensors, Sensors, Annealing, Dielectrics, Silicon, Magnetism, Surface micromachining

Proceedings Article | 25 August 2000
Proc. SPIE. 4174, Micromachining and Microfabrication Process Technology VI
KEYWORDS: Microelectromechanical systems, Multilayers, Microresonators, Microsystems, Annealing, Manufacturing, Heat treatments, Doping, Low pressure chemical vapor deposition, Phosphorus

Showing 5 of 16 publications
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