Defeng Liao
at Chengdu Fine Optical Engineering Research Ctr
SPIE Involvement:
Author
Area of Expertise:
optical fabrication , laser induced damage
Publications (4)

SPIE Journal Paper | September 17, 2018
OE Vol. 57 Issue 09
KEYWORDS: Polishing, Surface finishing, Chemical mechanical planarization, Diamond, Particles, Optical engineering, Optics manufacturing, Polyurethane, Semiconducting wafers, Silica

PROCEEDINGS ARTICLE | July 24, 2018
Proc. SPIE. 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
KEYWORDS: Optical components, Diamond, Polishing, Polyurethane, Polishing equipment, Particles, Control systems, Optics manufacturing, Surface finishing, Chemical mechanical planarization

PROCEEDINGS ARTICLE | March 5, 2018
Proc. SPIE. 10710, Young Scientists Forum 2017
KEYWORDS: Optical components, Mirrors, Polishing, Mechanics, Interferometers, Sensors, Interferometry, 3D metrology, Optics manufacturing, Surface finishing

PROCEEDINGS ARTICLE | March 5, 2018
Proc. SPIE. 10710, Young Scientists Forum 2017
KEYWORDS: Diamond, Polishing, Sensors, Glasses, Annealing, Silicon, Manufacturing, Photomasks, Active sensors, Surface finishing

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