Dr. Haiyang Quan
at Institute of Optics And Electronics CAS
SPIE Involvement:
Publications (9)

Proceedings Article | 20 December 2023 Poster + Paper
Jianyao Luo, Jianke Li, Haiyang Quan, Jian Wang, Song Hu
Proceedings Volume 12769, 127691H (2023) https://doi.org/10.1117/12.2688938
KEYWORDS: Wavefront errors, Calibration, Spherical lenses, Wavefronts, Interferometers, Error analysis, Design, Control systems, Wavefront aberrations, Light sources

Proceedings Article | 4 April 2023 Paper
Proceedings Volume 12617, 126176M (2023) https://doi.org/10.1117/12.2666722
KEYWORDS: Lithography, Mathematical optimization, Matrices, Lithographic illumination, Genetic algorithms, Particle swarm optimization, Image processing, Source mask optimization, Coherence imaging, Technology

Proceedings Article | 9 January 2023 Paper
Proceedings Volume 12507, 125072F (2023) https://doi.org/10.1117/12.2656462
KEYWORDS: Calibration, Spherical lenses, Wavefronts, Monochromatic aberrations, Optical spheres, Zemax, Measurement devices, Interferometers, Lithography, Glasses

Proceedings Article | 18 November 2019 Paper
Proceedings Volume 11189, 1118911 (2019) https://doi.org/10.1117/12.2538863
KEYWORDS: Defect detection, Optical components, Spherical lenses, Imaging systems, Light sources, Light scattering, Light scattering, Light emitting diodes, Light emitting diodes, Scattering, Scattering, Interferometers, Interferometers, Visibility, Visibility

Proceedings Article | 26 April 2019 Presentation + Paper
Proceedings Volume 11032, 110320J (2019) https://doi.org/10.1117/12.2520894
KEYWORDS: Interferometry, X-rays, Optical testing, X-ray optics, Optical fabrication

Showing 5 of 9 publications
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