Dr. Hsin-Ming Hou
Senior Manager at United Microelectronics Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 8 March 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Optical proximity correction, Electrical breakdown, Statistical analysis, Databases, Semiconducting wafers, Critical dimension metrology, Inspection, Resistance, Process control, Raw materials, Image quality, Manufacturing

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