In high power eximer laser system, amplified spontaneous emission (ASE) decreases the signal contrast ratio severely, leads to waveform broadening and distortion, and impacts on accurate physical experiments. In this article, based on principle of short pulse generation by electro-optical (E-O) switch, a method for ASE suppression of laser amplifiers chain was established. A series of studies on UV electro-optical switches were carried out, and electro-optical (E-O) switches with high extinction ratio were developed. In the waveform clipping experiments of the first pre-amplifier, the extinction ratio of the single and cascaded dual E-O switch reaches 103 and 104 order of magnitude, the laser pulse signal contrast ratio was promoted to 105 and 106 level, respectively. In the experiments of single channel MOPA (Master Oscillator Power Amplifier system), the cascaded dual E-O switch was adopted to suppress ASE of the whole system, and a fine narrow pulse was obtained on the target surface, which gives out one effective solution to the problem of waveform amplification of the high power eximer laser system.