Dr. Jan Hendrik Peters
International Management Consultant and Owner at bmbg Consult
SPIE Involvement:
Author
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Publications (30)

Proceedings Article | 9 November 2015 Paper
Proceedings Volume 9635, 96351D (2015) https://doi.org/10.1117/12.2205054
KEYWORDS: Extreme ultraviolet, Photomasks, Prototyping, Extreme ultraviolet lithography, Electromagnetic coupling, Metrology, Calibration, Scanners, Image acquisition, Image processing

Proceedings Article | 4 September 2015 Paper
Matt Malloy, Brad Thiel, Benjamin Bunday, Stefan Wurm, Vibhu Jindal, Maseeh Mukhtar, Kathy Quoi, Thomas Kemen, Dirk Zeidler, Anna Lena Eberle, Tomasz Garbowski, Gregor Dellemann, Jan Hendrik Peters
Proceedings Volume 9661, 96610O (2015) https://doi.org/10.1117/12.2196120
KEYWORDS: Inspection, Photomasks, Semiconducting wafers, Defect inspection, Extreme ultraviolet, Imaging systems, Wafer inspection, Optical inspection, Wafer-level optics, Optics manufacturing

Proceedings Article | 19 March 2015 Paper
Matt Malloy, Brad Thiel, Benjamin Bunday, Stefan Wurm, Maseeh Mukhtar, Kathy Quoi, Thomas Kemen, Dirk Zeidler, Anna Lena Eberle, Tomasz Garbowski, Gregor Dellemann, Jan Hendrik Peters
Proceedings Volume 9423, 942319 (2015) https://doi.org/10.1117/12.2175535
KEYWORDS: Inspection, Defect inspection, Photomasks, Semiconducting wafers, Optical inspection, Wafer inspection, Extreme ultraviolet, Manufacturing, Prototyping, Optics manufacturing

Proceedings Article | 16 March 2015 Paper
Proceedings Volume 9422, 942219 (2015) https://doi.org/10.1117/12.2086265
KEYWORDS: Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Imaging systems, Line width roughness, Scanners, Prototyping, EUV optics, Metrology, Reflectivity

Proceedings Article | 29 October 2014 Paper
Proceedings Volume 9235, 92350N (2014) https://doi.org/10.1117/12.2068308
KEYWORDS: Extreme ultraviolet, Photomasks, Scanners, Extreme ultraviolet lithography, Inspection, Electromagnetic coupling, Scanning electron microscopy, Prototyping, Manufacturing, Logic

Showing 5 of 30 publications
Conference Committee Involvement (16)
38th European Mask and Lithography Conference
19 June 2023 | Dresden, Germany
Photomask Technology
27 September 2021 | Online Only, United States
Photomask Technology
21 September 2020 | Online Only, California, United States
Photomask Technology
16 September 2019 | Monterey, California, United States
Photomask Technology
17 September 2018 | Monterey, California, United States
Showing 5 of 16 Conference Committees
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