Jiang Hu
at Xi'an Technological Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 19, 2015
Proc. SPIE. 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014)
KEYWORDS: Microelectromechanical systems, Silica, Etching, Polymers, Silicon, Wet etching, Deposition processes, Anisotropic etching, Polymer thin films, Plasma

PROCEEDINGS ARTICLE | February 19, 2015
Proc. SPIE. 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014)
KEYWORDS: Microelectromechanical systems, Etching, Image processing, Silicon, Oxygen, Scanning electron microscopy, Deep reactive ion etching, Reactive ion etching, Cryogenics, Anisotropic etching

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