Jiani Su
at Academy of Opto-Electronics CAS
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 24 January 2019 Paper
Proc. SPIE. 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics
KEYWORDS: Lithography, Diffraction, Metrology, Sensors, Calibration, Scanners, Wavefront sensors, Wavefronts, Projection systems, Phase measurement

Proceedings Article | 24 January 2019 Paper
Proc. SPIE. 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics
KEYWORDS: Confocal microscopy, Chromatic aberrations, Zemax, Sensors, Calibration, Spectrometers, Colorimetry

Proceedings Article | 18 January 2019 Paper
Proc. SPIE. 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
KEYWORDS: Interferometers, Motion measurement

Proceedings Article | 16 January 2019 Paper
Proc. SPIE. 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Zemax, Monochromatic aberrations, Prisms, Distortion, Lens design, Image quality, Micromirrors, Digital micromirror devices, Modulation transfer functions, Digital Light Processing

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Confocal microscopy, Lithography, Monochromatic aberrations, Metrology, Sensors, Inspection, Wavefront sensors, Wavefronts, Collimators, Zernike polynomials, Optical alignment, Wavefront reconstruction

Showing 5 of 8 publications
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