In this paper, a compact silicon photonics circuit is proposed. It consists of add-drop filter, input/output grating coupler. The resonance peak of add-drop filter can be tuned with the assist of p-i-n diode. The unknown frequency of microwave is loaded at the optical wave and coupled into the chip. The optical power ratio of through port and drop port is monotonous, which is corresponding to the unknown frequency. Meanwhile, the resonance peak of the ring can shift with the assist of p-i-n diode.
Silicon photonics circuit has been widely investigated in recent years, due to its advantage in the small footprint, high density integration and compatible with CMOS pilot line. In this paper, a compact, highly-sensitivity NaCl concentration sensor is experimentally demonstrated, based on the micro-ring resonators. The sensor circuit is composed of grating couplers, bus waveguide and micro-ring resonators. The width of optical waveguides is 450nm, with a thickness of 220nm. The chip was fabricated in imec through the ePIXfab multi-project wafer service supported by our group, which is compatible with the CMOS process line. The chip shows high sensitivity, as high as of more than 80nm/RIU, which corresponding to a detection limit of 1.6e<sup>-4</sup> by using optical spectrum analyzer.